Paper
9 August 1988 Algorithm For LI Near Gradient Refractive Indices
Roy F. Potter
Author Affiliations +
Proceedings Volume 0946, Spectroscopic Characterization Techniques for Semiconductor Technology III; (1988) https://doi.org/10.1117/12.947420
Event: Advances in Semiconductors and Superconductors: Physics and Device Applications, 1988, Newport Beach, CA, United States
Abstract
Electronic and optical materials can and are being fabricated in a variety of forms including monotonic variation of their physical properties. A characteristic matrix for translating the optical parameters in media having linear gradients In complex refractive indices Is the basis for an algorithm for a program to calculate optical parameters for ellipsometry, reflectance and transmittance. Illustrative examples are given for three different types of gradient systems such as might be encountered in opto-electronic applications.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Roy F. Potter "Algorithm For LI Near Gradient Refractive Indices", Proc. SPIE 0946, Spectroscopic Characterization Techniques for Semiconductor Technology III, (9 August 1988); https://doi.org/10.1117/12.947420
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KEYWORDS
Reflectivity

Refractive index

Semiconductors

Image segmentation

Lithium

Polarization

Spectroscopy

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