Modulation Spectroscopy Of Semiconductor Microstructures: An Overview

Fred H. Pollak; O. J. Glembocki

doi:10.1117/12.947409

9 August 1988 Modulation Spectroscopy Of Semiconductor Microstructures: An Overview

Fred H. Pollak, O. J. Glembocki

Proceedings Volume 0946, Spectroscopic Characterization Techniques for Semiconductor Technology III; (1988) https://doi.org/10.1117/12.947409
Event: Advances in Semiconductors and Superconductors: Physics and Device Applications, 1988, Newport Beach, CA, United States

Abstract

Modulation spectroscopy utilizes a general principle of experimental physics, in which a periodically applied perturbation either to the probe or the sample leads to derivative-like features in the optical response of the sample. We review the application of the modulation techniques of electroreflectance, photoreflectance and piezomodulation to microstructure such as quantum wells, superlattices and modulation doped heterojunctions. It is shown that modulation spectroscopy is a powerful set of optical tools for the characterization of microstructures.

Citation Download Citation

Fred H. Pollak and O. J. Glembocki "Modulation Spectroscopy Of Semiconductor Microstructures: An Overview", Proc. SPIE 0946, Spectroscopic Characterization Techniques for Semiconductor Technology III, (9 August 1988); https://doi.org/10.1117/12.947409

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