Paper
9 August 1988 Scanning Tunneling Spectroscopy
D. K. Biegelsen
Author Affiliations +
Proceedings Volume 0946, Spectroscopic Characterization Techniques for Semiconductor Technology III; (1988) https://doi.org/10.1117/12.947433
Event: Advances in Semiconductors and Superconductors: Physics and Device Applications, 1988, Newport Beach, CA, United States
Abstract
Scanning tunneling microscopy (STM) provides a means of directly imaging surface topography with atomic scale resolution. Scanning tunneling spectroscopy (STS) usually refers to the image-wise determination of the tunnel current variation with bias voltage for fixed tunnel gap width. Results can be related to the density of filled and empty surface electronic states. The association of energetic features with spatially localized features is a unique capability. Other variations of STS are inelastic tunneling imaging and barrier spectroscopic imaging. All these techniques are described and representative examples given to provide a survey of STS.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
D. K. Biegelsen "Scanning Tunneling Spectroscopy", Proc. SPIE 0946, Spectroscopic Characterization Techniques for Semiconductor Technology III, (9 August 1988); https://doi.org/10.1117/12.947433
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Cited by 2 scholarly publications.
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KEYWORDS
Spectroscopy

Information technology

Chemical species

Scanning tunneling microscopy

Semiconductors

Silicon

Metals

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