Laser Scatterometer

Yi-Sheng Chen; Wen-Gui Wang

doi:10.1117/12.948104

5 April 1989 Laser Scatterometer

Yi-Sheng Chen, Wen-Gui Wang

Proceedings Volume 0967, Stray Light and Contamination in Optical Systems; (1989) https://doi.org/10.1117/12.948104
Event: 32nd Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1988, San Diego, CA, United States

Abstract

We research and manufacture an instrument for measuring surface scattering and roughness of supersmooth surfaces. It can be used not only for measuring opaque sample but also for measuring transparent sample.

Citation Download Citation

Yi-Sheng Chen and Wen-Gui Wang "Laser Scatterometer", Proc. SPIE 0967, Stray Light and Contamination in Optical Systems, (5 April 1989); https://doi.org/10.1117/12.948104

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available