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5 April 1989 Measurement Of Very Near Specular Scatter
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Abstract
Scatterometer optics create near specular scatter (instrument signature) that complicates the process of measuring near specular scatter from samples. In order to achieve measurements within one degree of specular, the instrument signature must be compared to (or subtracted from) the scatter measured from the sample/instrument combination. Because sample scatter is independent of instrument signature, high scatter samples will separate from signature closer to specular than low scatter samples. This paper reports the results of an effort to measure down to few thousandths of a degree from specular. The samples are Bragg cells designed for use in RF spectrometers and the data is taken at 0.86 microns. Data from several materials are presented. The inherent physical limitations imposed on such measurements are also discussed.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Fredrick M. Cady, John C. Stover, Tod F. Schiff, Kyle A Klicker, and Donald R Bjork "Measurement Of Very Near Specular Scatter", Proc. SPIE 0967, Stray Light and Contamination in Optical Systems, (5 April 1989); https://doi.org/10.1117/12.948111
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