Translator Disclaimer
5 April 1989 Near Specular Scatter Measurement Techniques For Curved Samples
Author Affiliations +
Measurement of near specular scatter requires the specular beam to be tightly focused at the detector plane. The instrument signature is compared to the sample data and the separation point found to determine the minimum measurable scatter angle. Problems arise with this technique when curved samples are measured because the sample changes the beam focus location and requires adjustments to the instrument optics. The result is a focused spot of different diameter. This causes problems when comparing to the instrument signature. This issue, and its correction, are discussed in the paper. Converging samples can be measured closer to specular than flats of similar quality, while diverging samples reduce the ability to measure near specular. Data is presented to illustrate this effect.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kyle A. Klicker, John C. Stover, and Dan J. Wilson "Near Specular Scatter Measurement Techniques For Curved Samples", Proc. SPIE 0967, Stray Light and Contamination in Optical Systems, (5 April 1989);


A Status Of The Stray Light Contamination Problem
Proceedings of SPIE (August 05 1980)
Measurement Of Very Near Specular Scatter
Proceedings of SPIE (April 05 1989)
Stray Light Problems, Concepts, And Tools
Proceedings of SPIE (June 03 1987)
Mirror cleaning investigations at the CFHT
Proceedings of SPIE (June 01 1994)
Validation of a laser based system for ground measurement of...
Proceedings of SPIE (September 07 2006)
A Small-Angle Scatterometer
Proceedings of SPIE (April 05 1989)

Back to Top