Near Specular Scatter Measurement Techniques For Curved Samples

Kyle A. Klicker; John C. Stover; Dan J. Wilson

doi:10.1117/12.948110

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5 April 1989 Near Specular Scatter Measurement Techniques For Curved Samples

Kyle A. Klicker, John C. Stover, Dan J. Wilson

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Proceedings Volume 0967, Stray Light and Contamination in Optical Systems; (1989) https://doi.org/10.1117/12.948110
Event: 32nd Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1988, San Diego, CA, United States

Abstract

Measurement of near specular scatter requires the specular beam to be tightly focused at the detector plane. The instrument signature is compared to the sample data and the separation point found to determine the minimum measurable scatter angle. Problems arise with this technique when curved samples are measured because the sample changes the beam focus location and requires adjustments to the instrument optics. The result is a focused spot of different diameter. This causes problems when comparing to the instrument signature. This issue, and its correction, are discussed in the paper. Converging samples can be measured closer to specular than flats of similar quality, while diverging samples reduce the ability to measure near specular. Data is presented to illustrate this effect.

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Kyle A. Klicker, John C. Stover, and Dan J. Wilson "Near Specular Scatter Measurement Techniques For Curved Samples", Proc. SPIE 0967, Stray Light and Contamination in Optical Systems, (5 April 1989); https://doi.org/10.1117/12.948110

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