Raster Area Scatter Measurements And Sample Uniformity

J. Rifkin; J C Stover; D E. McGary; K. H. Kirchner; D J. Wilson

doi:10.1117/12.948101

5 April 1989 Raster Area Scatter Measurements And Sample Uniformity

J. Rifkin, J C Stover, D E. McGary, K. H. Kirchner, D J. Wilson

Proceedings Volume 0967, Stray Light and Contamination in Optical Systems; (1989) https://doi.org/10.1117/12.948101
Event: 32nd Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1988, San Diego, CA, United States

Abstract

Raster scan measurement of optical light scatter is described. Comparison is made of angle scan and raster scan data taken with a CASITh/RASITh scatterometer. A new technique for very fast surface scans is presented.

Citation Download Citation

J. Rifkin, J C Stover, D E. McGary, K. H. Kirchner, and D J. Wilson "Raster Area Scatter Measurements And Sample Uniformity", Proc. SPIE 0967, Stray Light and Contamination in Optical Systems, (5 April 1989); https://doi.org/10.1117/12.948101

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