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5 April 1989 Raster Area Scatter Measurements And Sample Uniformity
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Abstract
Raster scan measurement of optical light scatter is described. Comparison is made of angle scan and raster scan data taken with a CASITh/RASITh scatterometer. A new technique for very fast surface scans is presented.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. Rifkin, J C Stover, D E. McGary, K. H. Kirchner, and D J. Wilson "Raster Area Scatter Measurements And Sample Uniformity", Proc. SPIE 0967, Stray Light and Contamination in Optical Systems, (5 April 1989); https://doi.org/10.1117/12.948101
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