XeCl Laser Ablation Of Organic Polymers: Characterization Of Debris And Its Effect On Surface Morphology

Donald L. Singleton; George Paraskevopoulos; Robert S. Irwin; Roderick S. Taylor; Kurt E. Leopold

doi:10.1117/12.960210

16 December 1988 XeCl Laser Ablation Of Organic Polymers: Characterization Of Debris And Its Effect On Surface Morphology

Donald L. Singleton, George Paraskevopoulos, Robert S. Irwin, Roderick S. Taylor, Kurt E. Leopold

Author Affiliations +

Proceedings Volume 0998, Excimer Beam Applications; (1988) https://doi.org/10.1117/12.960210
Event: O-E/Fiber LASE '88, 1988, Boston, MA, United States

Abstract

Evidence is presented, that the formation of conical structures on the surface of polyi-mide etched at low laser fluences is caused by shielding of the underlying polymer by particulate debris. The results show that with increasing diameter of the etched zone, higher laser fluences are required to achieve a smooth surface. XeCl ablation of polyimide in an atmosphere of oxygen at 0.2 J/cm² results in oxidation of nearly 90% of ablated carbon to CO₂ and CO, but does not eliminate the deposition of debris on the perimeter of the etched zone.

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Donald L. Singleton, George Paraskevopoulos, Robert S. Irwin, Roderick S. Taylor, and Kurt E. Leopold "XeCl Laser Ablation Of Organic Polymers: Characterization Of Debris And Its Effect On Surface Morphology", Proc. SPIE 0998, Excimer Beam Applications, (16 December 1988); https://doi.org/10.1117/12.960210

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