Improving efficiency of chemo-mechanical polishing processes by systematic selection and conditioning of the polishing suspension

Christian J. Trum; Rolf Rascher

doi:10.1117/12.2236000

30 June 2016 Improving efficiency of chemo-mechanical polishing processes by systematic selection and conditioning of the polishing suspension

Christian J. Trum, Rolf Rascher

Author Affiliations +

Proceedings Volume 10009, Third European Seminar on Precision Optics Manufacturing; 1000902 (2016) https://doi.org/10.1117/12.2236000
Event: Third European Seminar on Precision Optics Manufacturing, 2016, Teisnach, Germany

Abstract

During design of optical systems or individual components, customers and designers already predetermine the way through production and the necessary resources. They define the tolerances that are required for their application like shape, micro-roughness and cleanliness, as well as the glass material that is necessary for the targeted optical effect. By the tolerances, they have also an influence on the manufacturer and his decisions on the production environment, measurement technology and the process chain that in his opinion is necessary to meet the specification. In most cases the type of polishing suspension and its parameters are also predetermined by the use of central polishing supply systems.

With this paper, the authors want to give a prospect of a currently running research with the aim of increasing the efficiency of chemo-mechanical polishing processes by a systematic selection and conditioning of the polishing suspension. They want to show that small amounts of well-conditioned and stabilized polishing suspension could be a tool to improve the efficiency in CMP processes under the influence of the global trend to products that are more individual and down to one piece flow production.

Main parts of this research are the identification of influences of polishing suspensions on the quality criteria of optical components and the creation of a method to find well-working suspension parameters in a deterministic and reproducible way.

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Christian J. Trum and Rolf Rascher "Improving efficiency of chemo-mechanical polishing processes by systematic selection and conditioning of the polishing suspension", Proc. SPIE 10009, Third European Seminar on Precision Optics Manufacturing, 1000902 (30 June 2016); https://doi.org/10.1117/12.2236000

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KEYWORDS

Polishing

Optics manufacturing

Chemical mechanical planarization

Glasses

Ion beams

Surface finishing

Manufacturing

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