Sensitive temperature measurements based on Lorentzian and Fano resonance lineshapes of a silicon photonic crystal cavity

Chenyang Zhao; Liang Fang; Qinchen Yuan; Xuetao Gan; Jianlin Zhao

doi:10.1117/12.2248521

31 October 2016 Sensitive temperature measurements based on Lorentzian and Fano resonance lineshapes of a silicon photonic crystal cavity

Chenyang Zhao, Liang Fang, Qinchen Yuan, Xuetao Gan, Jianlin Zhao

Author Affiliations +

Proceedings Volume 10022, Holography, Diffractive Optics, and Applications VII; 100222I (2016) https://doi.org/10.1117/12.2248521
Event: SPIE/COS Photonics Asia, 2016, Beijing, China

Abstract

We report a high-performance photonic temperature sensor by exploiting a silicon photonic crystal (PC) cavity. Since the PC cavity’s spectra are very sensitive to the refractive index change, we observe remarkable variations of its resonant wavelength and output power under varying temperature levels. In a PC cavity with Lorentzian resonance lineshape, the sensor exhibits a linear spectrum-sensitivity of 70 pm/ ℃ , and the power-variation presents a high sensitivity as 1.28 dB/℃. In addition, the Fano resonance lineshape generated by the PC cavity has also been employed to measure the temperature, which shows improved power sensitivity as 2.94 dB/ ℃. The demonstrated PC cavity-based sensor offers great potentials for low-cost, high sensitivity homogeneous sensing in chip-integrated devices.

Citation Download Citation

Chenyang Zhao, Liang Fang, Qinchen Yuan, Xuetao Gan, and Jianlin Zhao "Sensitive temperature measurements based on Lorentzian and Fano resonance lineshapes of a silicon photonic crystal cavity", Proc. SPIE 10022, Holography, Diffractive Optics, and Applications VII, 100222I (31 October 2016); https://doi.org/10.1117/12.2248521

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