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4 November 2016 Concepts for compact mid-IR spectroscopy in photochemistry
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Mid-infrared (IR) spectroscopy, typically 3 to 5 µm, is often the technology of choice to monitor the interaction between and concentration of molecules during photochemical reactions. However, classical mid-IR spectrometers are bulky, complex and expensive, making them unsuitable for use in the miniaturized microreactors increasingly being employed for chemical synthesis. We present here the concept for an ultra-miniaturized mid-IR spectrometer directly integrated onto a chemical microreactor to monitor the chemical reaction. The spectrometer is based on micro-machined Fabry-Perot resonator filters realized using pairs of Bragg mirrors to achieve a high spectral resolution. The fabrication of the optical filters is outlined and the measurement of transmittance spectra in the mid-IR range show a good agreement with theory and are thus promising candidates for a fully integrated system.
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Phuong-Ha Cu-Nguyen, Ziyu Wang, and Hans Zappe "Concepts for compact mid-IR spectroscopy in photochemistry", Proc. SPIE 10025, Advanced Sensor Systems and Applications VII, 100251O (4 November 2016);

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