Polymer planar waveguide broadband differential interferometer

T. Herzog; K. Gut; Z. Opilski; P. Kałużyński; G. Adamski

doi:10.1117/12.2249384

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28 September 2016 Polymer planar waveguide broadband differential interferometer

T. Herzog, K. Gut, Z. Opilski, P. Kałużyński, G. Adamski

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Proceedings Volume 10031, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2016; 100311J (2016) https://doi.org/10.1117/12.2249384
Event: Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2016, 2016, Wilga, Poland

Abstract

In the paper the planar waveguide based on SU-8 polymer were made on 2μm of silica (SiO₂) on silicon (Si) substrates in order to obtain base for broadband interferometer. Analysis and calculation of sensitivity for single mode broadband differential interferometer were performed. Paper presents preliminary tests and analysis of such structures. Dilution of SU-8 solution for obtaining thin layer (below 500 nm) followed by elipsometric measurements is presented.

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T. Herzog, K. Gut, Z. Opilski, P. Kałużyński, and G. Adamski "Polymer planar waveguide broadband differential interferometer", Proc. SPIE 10031, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2016, 100311J (28 September 2016); https://doi.org/10.1117/12.2249384

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