Integration of ZnO nanoparticle transistors on freestanding flexible substrates

Fábio F. Vidor; Thorsten Meyers; Ulrich Hilleringmann

doi:10.1117/12.2243134

3 February 2017 Integration of ZnO nanoparticle transistors on freestanding flexible substrates

Fábio F. Vidor, Thorsten Meyers, Ulrich Hilleringmann

Proceedings Volume 10036, Fourth Conference on Sensors, MEMS, and Electro-Optic Systems; 100360A (2017) https://doi.org/10.1117/12.2243134
Event: Fourth Conference on Sensors, MEMS and Electro-Optic Systems, 2016, Skukuza, Kruger National Park, South Africa

Abstract

Nowadays, thin-film transistors (TFTs) are being actively researched not only by the scientific community but also by the industry. They are the crucial elements for the driving currents in flexible displays, radio frequency identification tags and wearable electronic skins. In this study, we present a low-cost integration process of ZnO nanoparticle TFTs on flexible substrates with a maximum process temperature limited to 115 °C. As gate dielectric a high-k resin filled with TiO₂ nanoparticle was used. This nanocomposite combines the mechanical flexibility of organic compounds with the high dielectric permittivity of inorganic materials. For the stabilization of the nanoparticulated ZnO film, a high humidity treatment was performed subsequent to an ultra-violet irradiation step in order to prevent the adsorption of oxygen molecules by the nanoparticles. The transistor integration process was performed on a freestanding polyethylene terephthalate (PET) substrate. This technique enables a more realistic scenario for a later large-scale production and avails adequate photolithographic resolution and accurate alignment between different mask levels. Additionally, in order to improve the electrical properties of the nanoparticulated semiconducting film, the nanoparticles were deposited using either spin-coating or spray-coating techniques; furthermore, different surface pretreatments were executed.

Citation Download Citation

Fábio F. Vidor, Thorsten Meyers, and Ulrich Hilleringmann "Integration of ZnO nanoparticle transistors on freestanding flexible substrates", Proc. SPIE 10036, Fourth Conference on Sensors, MEMS, and Electro-Optic Systems, 100360A (3 February 2017); https://doi.org/10.1117/12.2243134

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available