Piezoelectric micromachined ultrasonic transducers and micropumps: from design to optomicrofluidic applications

Shadi Khazaaleh; Numan Saeed; Inas Taha; Mateusz T. Madzik; Jaime Viegas

doi:10.1117/12.2254733

27 March 2017 Piezoelectric micromachined ultrasonic transducers and micropumps: from design to optomicrofluidic applications

Shadi Khazaaleh, Numan Saeed, Inas Taha, Mateusz T. Madzik, Jaime Viegas

Author Affiliations +

Proceedings Volume 10061, Microfluidics, BioMEMS, and Medical Microsystems XV; 100610S (2017) https://doi.org/10.1117/12.2254733
Event: SPIE BiOS, 2017, San Francisco, California, United States

Abstract

In this work, we present the experimental results of a new wafer-level production platform for aluminum nitride based piezoelectric micromachined ultrasonic transducers (PMUTs), operated by lower than 10 V peak-to-peak signals, and covering ultrasonic frequency ranges from 200 kHz up to 10 MHz, with measured axial displacements ranging from a few nanometers up to 600 nm. The fabricated devices have a low footprint of (130x130) μm². The experimental results are in excellent agreement with finite-element method simulations. The small footprint and driving voltages of these piezo-microactuators are well suited for the development of micropump and micromixer designs for portable microfluidics applications.

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Citation Download Citation

Shadi Khazaaleh, Numan Saeed, Inas Taha, Mateusz T. Madzik, and Jaime Viegas "Piezoelectric micromachined ultrasonic transducers and micropumps: from design to optomicrofluidic applications", Proc. SPIE 10061, Microfluidics, BioMEMS, and Medical Microsystems XV, 100610S (27 March 2017); https://doi.org/10.1117/12.2254733

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