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21 March 1989 Characterization Of Mirror Surfaces For Laser-Gyro Applications
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Proceedings Volume 1009, Surface Measurement and Characterization; (1989) https://doi.org/10.1117/12.949167
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany
Abstract
Low scatter mirror substrates for laser-gyro applications were investigated. Bare samples, prepared by different especially developed polishing processes were examined. Nomarski differential interference contrast microscopy was used to get an overview of the surfaces. It is demonstrated that this system yields a rms roughness resolution better than 0.1 nm. To objectify the results of the Nomarski system the total integrated scattering of the bare substrates was measured. For this purpose an Ulbricht integrating sphere with a special designed diaphragm to block unwanted light scatter by the rear side of the transparent substrate was used. Investigations of different surfaces gave results for the total integrated scattering from 10.10-6 to 3850.10-6 ; the corresponding rms roughnesses are 0.19 nm and 3.61 nm, respectively. Furthermore an especially developed polishing process which produces surfaces with a roughness of about 0.1 nm and probably lower is being discussed.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dirk-Roger Schmitt "Characterization Of Mirror Surfaces For Laser-Gyro Applications", Proc. SPIE 1009, Surface Measurement and Characterization, (21 March 1989); https://doi.org/10.1117/12.949167
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