Observation of fs-laser spallative ablation using soft X-ray laser probe

Masaharu Nishikino; Noboru Hasegawa; Takuro Tomita; Yasuo Minami; Takashi Eyama; Naoya Kakimoto; Rui Izutsu; Motoyoshi Baba; Tetsuya Kawachi; Tohru Suemoto

doi:10.1117/12.2255725

14 March 2017 Observation of fs-laser spallative ablation using soft X-ray laser probe

Masaharu Nishikino, Noboru Hasegawa, Takuro Tomita, Yasuo Minami, Takashi Eyama, Naoya Kakimoto, Rui Izutsu, Motoyoshi Baba, Tetsuya Kawachi, Tohru Suemoto

Author Affiliations +

Proceedings Volume 10091, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII; 100910O (2017) https://doi.org/10.1117/12.2255725
Event: SPIE LASE, 2017, San Francisco, California, United States

Abstract

The initial stages of femtosecond laser ablation of gold were observed by single-shot soft X-ray laser interferometer and reflectometer. The ablation front surface and the spallation shell dome structure were observed from the results of the soft X-ray interferogram, reflective image, and shadowgraph. The formation and evolution of soft X-ray Newton’s rings (NRs) were found by reflective imaging at the early stages of the ablation dynamics. The soft X-ray NRs are caused by the interference between the bulk ablated surface and nanometer-scale thin spallation layer. The spallation layer was kept at the late timing of the ablation dynamics, and the height of that reached over 100 μm. The temporal evolution of the bulk ablated surface was observed in the ablation dynamics. From these results, we have succeeded in obtaining the temporal evolution of the ablation front exfoliated from the gold surface.

Citation Download Citation

Masaharu Nishikino, Noboru Hasegawa, Takuro Tomita, Yasuo Minami, Takashi Eyama, Naoya Kakimoto, Rui Izutsu, Motoyoshi Baba, Tetsuya Kawachi, and Tohru Suemoto "Observation of fs-laser spallative ablation using soft X-ray laser probe", Proc. SPIE 10091, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII, 100910O (14 March 2017); https://doi.org/10.1117/12.2255725

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