Fully Planar GaAs Waveguides By Spin-On Glass Zinc Diffusion

Y. Gigase; R. Baets; M. Belanger; S. I. Najafi

doi:10.1117/12.949406

5 April 1989 Fully Planar GaAs Waveguides By Spin-On Glass Zinc Diffusion

Y. Gigase, R. Baets, M. Belanger, S. I. Najafi

Proceedings Volume 1014, Micro-Optics; (1989) https://doi.org/10.1117/12.949406
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

We present the details of a new fabrication technique for making planar waveguides in III-V semiconductors. Using this technique we made single mode totally planar waveguides in GaAs with measured propagation losses of 1.9 dB/cm.

Citation Download Citation

Y. Gigase, R. Baets, M. Belanger, and S. I. Najafi "Fully Planar GaAs Waveguides By Spin-On Glass Zinc Diffusion", Proc. SPIE 1014, Micro-Optics, (5 April 1989); https://doi.org/10.1117/12.949406

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