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5 April 1989Fully Planar GaAs Waveguides By Spin-On Glass Zinc Diffusion
We present the details of a new fabrication technique for making planar waveguides in III-V semiconductors. Using this technique we made single mode totally planar waveguides in GaAs with measured propagation losses of 1.9 dB/cm.
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Y. Gigase, R. Baets, M. Belanger, S. I. Najafi, "Fully Planar GaAs Waveguides By Spin-On Glass Zinc Diffusion," Proc. SPIE 1014, Micro-Optics, (5 April 1989); https://doi.org/10.1117/12.949406