Development of nanoimprint lithography templates for the contact hole layer application (Conference Presentation)

Koji Ichimura; Ryugo Hikichi; Saburo Harada; Koichi Kanno; Masaaki Kurihara; Naoya Hayashi

doi:10.1117/12.2263460

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27 April 2017 Development of nanoimprint lithography templates for the contact hole layer application (Conference Presentation)

Koji Ichimura, Ryugo Hikichi, Saburo Harada, Koichi Kanno, Masaaki Kurihara, Naoya Hayashi

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Proceedings Volume 10144, Emerging Patterning Technologies; 101440D (2017) https://doi.org/10.1117/12.2263460
Event: SPIE Advanced Lithography, 2017, San Jose, California, United States

Abstract

Nanoimprint lithography, NIL, is gathering much attention as one of the most potential candidates for the next generation lithography for semiconductor. This technology needs no pattern data modification for exposure, simpler exposure system, and single step patterning process without any coat/develop truck, and has potential of cost effective patterning rather than very complex optical lithography and/or EUV lithography. NIL working templates are made by the replication of the EB written high quality master templates. Fabrication of high resolution master templates is one of the most important issues. Since NIL is 1:1 pattern transfer process, master templates have 4 times higher resolution compared with photomasks. Another key is to maintain the quality of the master templates in replication process. NIL process is applied for the template replication and this imprint process determines most of the performance of the replicated templates. Expectations to the NIL are not only high resolution line and spaces but also the contact hole layer application. Conventional ArF-i lithography has a certain limit in size and pitch for contact hole fabrication. On the other hand, NIL has good pattern fidelity for contact hole fabrication at smaller sizes and pitches compared with conventional optical lithography. Regarding the tone of the templates for contact hole, there are the possibilities of both tone, the hole template and the pillar template, depending on the processes of the wafer side. We have succeeded to fabricate both types of templates at 2xnm in size. In this presentation, we will be discussing fabrication or our replica template for the contact hole layer application. Both tone of the template fabrication will be presented as well as the performance of the replica templates. We will also discuss the resolution improvement of the hole master templates by using various e-beam exposure technologies.

Conference Presentation

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Koji Ichimura, Ryugo Hikichi, Saburo Harada, Koichi Kanno, Masaaki Kurihara, and Naoya Hayashi "Development of nanoimprint lithography templates for the contact hole layer application (Conference Presentation)", Proc. SPIE 10144, Emerging Patterning Technologies, 101440D (27 April 2017); https://doi.org/10.1117/12.2263460

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