High-resolution, high-throughput, CMOS-compatible electron-beam patterning

Melissa A. Smith; Steven A. Vitale; Theodore H. Fedynyshyn; Matthew T. Cook; Joel Maldonado; Dmitri Shapiro; Mordechai Rothschild

doi:10.1117/12.2256649

27 March 2017 High-resolution, high-throughput, CMOS-compatible electron-beam patterning

Melissa A. Smith, Steven A. Vitale, Theodore H. Fedynyshyn, Matthew T. Cook, Joel Maldonado, Dmitri Shapiro, Mordechai Rothschild

Author Affiliations +

Proceedings Volume 10146, Advances in Patterning Materials and Processes XXXIV; 101461H (2017) https://doi.org/10.1117/12.2256649
Event: SPIE Advanced Lithography, 2017, San Jose, California, United States

Abstract

Two scanning electron beam lithography (SEBL) patterning processes have been developed, one positive and one negative tone. The processes feature nanometer-scale resolution, chemical amplification for faster throughput, long film life under vacuum, and sufficient etch resistance to enable patterning of a variety of materials with a metal-free (CMOS/MEMS compatible) tool set. These resist processes were developed to address two limitations of conventional SEBL resist processes: (1) low areal throughput and (2) limited compatibility with the traditional microfabrication infrastructure.

Citation Download Citation

Melissa A. Smith, Steven A. Vitale, Theodore H. Fedynyshyn, Matthew T. Cook, Joel Maldonado, Dmitri Shapiro, and Mordechai Rothschild "High-resolution, high-throughput, CMOS-compatible electron-beam patterning", Proc. SPIE 10146, Advances in Patterning Materials and Processes XXXIV, 101461H (27 March 2017); https://doi.org/10.1117/12.2256649

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available