Development of novel purifiers with appropriate functional groups based on solvent polarities at bulk filtration

Tetsu Kohyama; Fumiya Kaneko; Saksatha Ly; James Hamzik; Jad Jaber; Yoshiaki Yamada

doi:10.1117/12.2257388

27 March 2017 Development of novel purifiers with appropriate functional groups based on solvent polarities at bulk filtration

Tetsu Kohyama, Fumiya Kaneko, Saksatha Ly, James Hamzik, Jad Jaber, Yoshiaki Yamada

Author Affiliations +

Proceedings Volume 10146, Advances in Patterning Materials and Processes XXXIV; 101461J (2017) https://doi.org/10.1117/12.2257388
Event: SPIE Advanced Lithography, 2017, San Jose, California, United States

Abstract

Weak-polar solvents like PGMEA (Propylene Glycol Monomethyl Ether Acetate) or CHN (Cyclohexanone) are used to dissolve hydrophobic photo-resist polymers, which are challenging for traditional cleaning methods such as distillation, ion-exchange resins service or water-washing processes. This paper investigated two novel surface modifications to see their effectiveness at metal removal and to understand the mechanism. The experiments yielded effective purification methods for metal reduction, focusing on solvent polarities based on HSP (Hansen Solubility Parameters), and developing optimal purification strategies.

Citation Download Citation

Tetsu Kohyama, Fumiya Kaneko, Saksatha Ly, James Hamzik, Jad Jaber, and Yoshiaki Yamada "Development of novel purifiers with appropriate functional groups based on solvent polarities at bulk filtration", Proc. SPIE 10146, Advances in Patterning Materials and Processes XXXIV, 101461J (27 March 2017); https://doi.org/10.1117/12.2257388

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