Effects of phenolic compound addition to fractionated Novolak-based resists to improve resolution capability(2)

Atsushi Sekiguchi; Yoko Matsumoto; Yoshihisa Sensu; Satoshi Takei; Makoto Hanabata; Hatsuyuki Tanaka

doi:10.1117/12.2257548

27 March 2017 Effects of phenolic compound addition to fractionated Novolak-based resists to improve resolution capability(2)

Atsushi Sekiguchi, Yoko Matsumoto, Yoshihisa Sensu, Satoshi Takei, Makoto Hanabata, Hatsuyuki Tanaka

Author Affiliations +

Proceedings Volume 10146, Advances in Patterning Materials and Processes XXXIV; 101461K (2017) https://doi.org/10.1117/12.2257548
Event: SPIE Advanced Lithography, 2017, San Jose, California, United States

Abstract

Novolak resists have been widely used in IC production and are used to this day in the production of flat panel displays (FPDs) and MEMS. However, with the advent of high-definition devices, FPDs must meet growing requirements for finer dimensions. These trends have generated requirements for higher sensitivity, higher resolution, and wider process margins for novolak resists. Using a lithography simulator with the goal of improving the performance of novolak resists, we examined various approaches to improving resist materials. This report discusses efforts to improve resolution and to broaden process margins using a novolak resin that exhibits a higher degree of fractionation than in the previous report (maximum fractionated resin) with the addition of low molecular weight phenol resins.

Citation Download Citation

Atsushi Sekiguchi, Yoko Matsumoto, Yoshihisa Sensu, Satoshi Takei, Makoto Hanabata, and Hatsuyuki Tanaka "Effects of phenolic compound addition to fractionated Novolak-based resists to improve resolution capability(2)", Proc. SPIE 10146, Advances in Patterning Materials and Processes XXXIV, 101461K (27 March 2017); https://doi.org/10.1117/12.2257548

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available