CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume 10147 > Article
Open Access Presentation
26 April 2017 Computational microscopy (Conference Presentation)
Laura Waller
Author Affiliations +
Proceedings Volume 10147, Optical Microlithography XXX; 1014708 (2017) https://doi.org/10.1117/12.2261296
Event: SPIE Advanced Lithography, 2017, San Jose, California, United States
Abstract
This talk will describe computational imaging methods for phase retrieval of mask effects, such as electromagnetic edge effects. Our experimental setups employ illumination-side or detection-side coding of angle (Fourier) space with simple hardware. The result is high-resolution intensity and phase images for quantifying mask edge effects. We describe methods for illumination coding Gigapixel microscopy in commercial microscopes and extend our methods to 3D imaging and algorithmic self-calibration. Through an end-to-end design of both the optical system and the computational algorithms, we achieve metrology modalities that are accurate, simple and flexible.
Conference Presentation

View presentation recording on the SPIE Digital Library: http://dx.doi.org/10.1117/12.2261296.5402356396001
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Laura Waller "Computational microscopy (Conference Presentation)", Proc. SPIE 10147, Optical Microlithography XXX, 1014708 (26 April 2017); https://doi.org/10.1117/12.2261296
PROCEEDINGS
 PRESENTATION
WATCH
PRESENTATION SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
KEYWORDS
Microscopy
Calibration
Computational imaging
Electromagnetism
Metrology
Microscopes
Phase retrieval
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top