Redundant via insertion in self-aligned double patterning

Youngsoo Song; Jinwook Jung; Youngsoo Shin

doi:10.1117/12.2258036

28 March 2017 Redundant via insertion in self-aligned double patterning

Youngsoo Song, Jinwook Jung, Youngsoo Shin

Proceedings Volume 10148, Design-Process-Technology Co-optimization for Manufacturability XI; 1014806 (2017) https://doi.org/10.1117/12.2258036
Event: SPIE Advanced Lithography, 2017, San Jose, California, United States

Abstract

Redundant via (RV) insertion is employed to enhance via manufacturability, and has been extensively studied. Self-aligned double patterning (SADP) process, brings a new challenge to RV insertion since newly created cut for each RV insertion has to be taken care of. Specifically, when a cut for RV, which we simply call RV-cut, is formed, cut conflict may occur with nearby line-end cuts, which results in a decrease in RV candidates. We introduce cut merging to reduce the number of cut conflicts; merged cuts are processed with stitch using litho-etch-litho-etch (LELE) multi-patterning method. In this paper, we propose a new RV insertion method with cut merging in SADP for the first time. In our experiments, a simple RV insertion yields 55.3% vias to receives RVs; our proposed method that considers cut merging increases that number to 69.6% on average of test circuits.

Conference Presentation

Citation Download Citation

Youngsoo Song, Jinwook Jung, and Youngsoo Shin "Redundant via insertion in self-aligned double patterning", Proc. SPIE 10148, Design-Process-Technology Co-optimization for Manufacturability XI, 1014806 (28 March 2017); https://doi.org/10.1117/12.2258036

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