Enhancing manufacturability of standard cells by using DTCO methodology

Lijun Zhao; Ying Chen; Xiaojing Su; Yajuan Su; Yayi Wei; Tianchun Ye

doi:10.1117/12.2263178

4 April 2017 Enhancing manufacturability of standard cells by using DTCO methodology

Lijun Zhao, Ying Chen, Xiaojing Su, Yajuan Su, Yayi Wei, Tianchun Ye

Proceedings Volume 10148, Design-Process-Technology Co-optimization for Manufacturability XI; 101481G (2017) https://doi.org/10.1117/12.2263178
Event: SPIE Advanced Lithography, 2017, San Jose, California, United States

Abstract

We demonstrate two different approaches of implementing design technology co-optimization (DTCO). One is on optimizing standard cells. Before being placed on mask, standard cells can be evaluated and optimized to gain better process windows. This approach enables an additional learning cycle before mask tapeout, reducing process development cost. The other approach uses a random pattern generator to create various patterns with high coverage based on given design rules. Lithography simulation is used to evaluate process window of these patterns, and annotates its printability. Test patterns generated in this way can be used for early process development.

Citation Download Citation

Lijun Zhao, Ying Chen, Xiaojing Su, Yajuan Su, Yayi Wei, and Tianchun Ye "Enhancing manufacturability of standard cells by using DTCO methodology", Proc. SPIE 10148, Design-Process-Technology Co-optimization for Manufacturability XI, 101481G (4 April 2017); https://doi.org/10.1117/12.2263178

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