Absolute and relative surface profile interferometry using multiple frequency-scanned lasers

Marek Peca; Pavel Psota; Petr Vojtíšek; Vít Lédl

doi:10.1117/12.2263656

11 November 2016 Absolute and relative surface profile interferometry using multiple frequency-scanned lasers

Marek Peca, Pavel Psota, Petr Vojtíšek, Vít Lédl

Proceedings Volume 10151, Optics and Measurement International Conference 2016; 101510H (2016) https://doi.org/10.1117/12.2263656
Event: Optics and Measurement 2016 International Conference, 2016, Liberec, Czech Republic

Abstract

An interferometer has been used to measure the surface profile of generic object. Frequency scanning interferometry has been employed to provide unambiguous phase readings, to suppress etalon fringes, and to supersede phase-shifting. The frequency scan has been performed in three narrow wavelength bands, each generated by a temperature tuned laser diode. It is shown, that for certain portions of measured object, it was possible to get absolute phase measurement, counting all wave periods from the point of zero path difference, yielding precision of 2.7nm RMS over 11.75mm total path difference. For the other areas where steep slopes were present in object geometry, a relative measurement is still possible, at measured surface roughness comparable to that of machining process (the same 2.7nm RMS). It is concluded, that areas containing steep slopes exhibit systematic error, attributed to a combined factors of dispersion and retrace error.

Citation Download Citation

Marek Peca, Pavel Psota, Petr Vojtíšek, and Vít Lédl "Absolute and relative surface profile interferometry using multiple frequency-scanned lasers", Proc. SPIE 10151, Optics and Measurement International Conference 2016, 101510H (11 November 2016); https://doi.org/10.1117/12.2263656

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