Method for the fabrication error calibration of the CGH used in the cylindrical interferometry system

Qingquan Wang; Yingjie Yu; Kebing Mou

doi:10.1117/12.2246767

19 October 2016 Method for the fabrication error calibration of the CGH used in the cylindrical interferometry system

Qingquan Wang, Yingjie Yu, Kebing Mou

Proceedings Volume 10155, Optical Measurement Technology and Instrumentation; 101551Z (2016) https://doi.org/10.1117/12.2246767
Event: International Symposium on Optoelectronic Technology and Application 2016, 2016, Beijing, China

Abstract

This paper presents a method of absolutely calibrating the fabrication error of the CGH in the cylindrical interferometry system for the measurement of cylindricity error. First, a simulated experimental system is set up in ZEMAX. On one hand, the simulated experimental system has demonstrated the feasibility of the method we proposed. On the other hand, by changing the different positions of the mirror in the simulated experimental system, a misalignment aberration map, consisting of the different interferograms in different positions, is acquired. And it can be acted as a reference for the experimental adjustment in real system. Second, the mathematical polynomial, which describes the relationship between the misalignment aberrations and the possible misalignment errors, is discussed.

Citation Download Citation

Qingquan Wang, Yingjie Yu, and Kebing Mou "Method for the fabrication error calibration of the CGH used in the cylindrical interferometry system", Proc. SPIE 10155, Optical Measurement Technology and Instrumentation, 101551Z (19 October 2016); https://doi.org/10.1117/12.2246767

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