Soft dielectric cantilevers with silicon tips for atomic force microscopy applications

Paweł Janus; Rafał Dobrowolski; Andrzej Sierakowski; Francesco Ivaldi; Dariusz Szmigiel; Jerzy Zając

doi:10.1117/12.2244789

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10 November 2016 Soft dielectric cantilevers with silicon tips for atomic force microscopy applications

Paweł Janus, Rafał Dobrowolski, Andrzej Sierakowski, Francesco Ivaldi, Dariusz Szmigiel, Jerzy Zając

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Proceedings Volume 10161, 14th International Conference on Optical and Electronic Sensors; 1016104 (2016) https://doi.org/10.1117/12.2244789
Event: 14th International Conference on Optical and Electronic Sensors, 2016, Gdansk, Poland

Abstract

In this paper authors present design, technology and application of soft silicon dioxide AFM cantilevers. Novel technology allows for manufacturing ultra-soft cantilevers equipped with silicon tip. Mechanical properties of developed probes were tested and finally applied in AFM measurements of fragile samples.

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Paweł Janus, Rafał Dobrowolski, Andrzej Sierakowski, Francesco Ivaldi, Dariusz Szmigiel, and Jerzy Zając "Soft dielectric cantilevers with silicon tips for atomic force microscopy applications", Proc. SPIE 10161, 14th International Conference on Optical and Electronic Sensors, 1016104 (10 November 2016); https://doi.org/10.1117/12.2244789

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