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27 February 1989 Numerical And Experimental Evaluations Of Multilayer Mirror For Soft X-Rays
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Proceedings Volume 1019, Thin Film Technologies III; (1989) https://doi.org/10.1117/12.950032
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany
Abstract
For the wavelength region from 24A to 44A, selection of materials used for the multi-layer mirror was done by computer simulation. The multilayers of Si02/Ni were produced by the ion beam sputtering method and evaluated by the C-K line, experimentally. In order to analyze scattering in the region of 0 ~ λ comparisons between the experimental results, and the solutions of Beckmann's theory and Extinction theory were done.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
K. Etoh, I. Kataoka, and K. Ito "Numerical And Experimental Evaluations Of Multilayer Mirror For Soft X-Rays", Proc. SPIE 1019, Thin Film Technologies III, (27 February 1989); https://doi.org/10.1117/12.950032
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