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27 February 1989Numerical And Experimental Evaluations Of Multilayer Mirror For Soft X-Rays
For the wavelength region from 24A to 44A, selection of materials used for the multi-layer mirror was done by computer simulation. The multilayers of Si02/Ni were produced by the ion beam sputtering method and evaluated by the C-K line, experimentally. In order to analyze scattering in the region of 0 ~ λ comparisons between the experimental results, and the solutions of Beckmann's theory and Extinction theory were done.
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K. Etoh, I. Kataoka, K. Ito, "Numerical And Experimental Evaluations Of Multilayer Mirror For Soft X-Rays," Proc. SPIE 1019, Thin Film Technologies III, (27 February 1989); https://doi.org/10.1117/12.950032