Research of the micromechanical three-axis accelerometer

B. Konoplev; I. Lysenko; E. Ryndin; O. Ezhova; F. Bondarev

doi:10.1117/12.2266766

30 December 2016 Research of the micromechanical three-axis accelerometer

B. Konoplev, I. Lysenko, E. Ryndin, O. Ezhova, F. Bondarev

Proceedings Volume 10224, International Conference on Micro- and Nano-Electronics 2016; 102241B (2016) https://doi.org/10.1117/12.2266766
Event: The International Conference on Micro- and Nano-Electronics 2016, 2016, Zvenigorod, Russian Federation

Abstract

In the report the linear acceleration sensor design with three axis of sensitivity is researched. Parameterized geometry and finite element model for modal analysis are developed in the ANSYS program. Behavioral description of the study design is developed with language VHDL-AMS to simulate the sensor operation under the influence of linear acceleration along three axis of sensitivity. On the basis of research results three-axis device sensitivity, cross-sensitivity, duration transients are specified. As part of the work the experimental sensor prototypes are fabricated.

Citation Download Citation

B. Konoplev, I. Lysenko, E. Ryndin, O. Ezhova, and F. Bondarev "Research of the micromechanical three-axis accelerometer", Proc. SPIE 10224, International Conference on Micro- and Nano-Electronics 2016, 102241B (30 December 2016); https://doi.org/10.1117/12.2266766

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