Deposition of polymers on structures with nano-gaps fabricated between carbon nanotubes by focused ion beam etching

A. V. Romashkin; A. V. Emelianov; K. A. Tsarik; I. I. Bobrinetskiy

doi:10.1117/12.2266747

30 December 2016 Deposition of polymers on structures with nano-gaps fabricated between carbon nanotubes by focused ion beam etching

A. V. Romashkin, A. V. Emelianov, K. A. Tsarik, I. I. Bobrinetskiy

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Proceedings Volume 10224, International Conference on Micro- and Nano-Electronics 2016; 102241R (2016) https://doi.org/10.1117/12.2266747
Event: The International Conference on Micro- and Nano-Electronics 2016, 2016, Zvenigorod, Russian Federation

Abstract

Carbon nanotube (CNT) and SiO₂ etching effects was studied and was found that using different techniques of focused ion beam (FIB) exposure and using two pass etching leads to a significant difference in the etching rate of CNTs relatively of SiO₂and directly individually oxide itself. The parameters annealing of the structures to remove the effects of the charge arising from the etching of CNT on SiO₂ was determined and the effect of the charge on the effects of the deposition of organic molecules from solution was studied. Different behavior of deposition of polar and non-polar polymer materials on charged regions with width less than 100 nm was found. Obtained structures was investigated by SEM, AFM methods and for structures with polyaniline deposited CVC was measured and by comparison with literature and experimental data analysis of polyaniline structuring in nano-scale gap formed with FIB was carried out.

Citation Download Citation

A. V. Romashkin, A. V. Emelianov, K. A. Tsarik, and I. I. Bobrinetskiy "Deposition of polymers on structures with nano-gaps fabricated between carbon nanotubes by focused ion beam etching", Proc. SPIE 10224, International Conference on Micro- and Nano-Electronics 2016, 102241R (30 December 2016); https://doi.org/10.1117/12.2266747

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KEYWORDS

Etching

Oxides

Gallium

Polymers

Doping

Phase shifts

Atomic force microscopy

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