Optical emission 2D-tomography of plasma: case of rectangular two-view scanning and diagonal symmetry of inhomogeneities

A. V. Fadeev; K. V. Rudenko

doi:10.1117/12.2266838

30 December 2016 Optical emission 2D-tomography of plasma: case of rectangular two-view scanning and diagonal symmetry of inhomogeneities

A. V. Fadeev, K. V. Rudenko

Author Affiliations +

Proceedings Volume 10224, International Conference on Micro- and Nano-Electronics 2016; 102242D (2016) https://doi.org/10.1117/12.2266838
Event: The International Conference on Micro- and Nano-Electronics 2016, 2016, Zvenigorod, Russian Federation

Abstract

The case of the diagonal symmetry of plasma inhomogeneities scanned at two-view emission tomography was investigated. Original method for 2D-tomographic reconstruction utilizing analytical description of local inhomogeneities of the spatial distribution of the density of neutral and charged plasma particles on the chamber cross section was improved.

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A. V. Fadeev and K. V. Rudenko "Optical emission 2D-tomography of plasma: case of rectangular two-view scanning and diagonal symmetry of inhomogeneities", Proc. SPIE 10224, International Conference on Micro- and Nano-Electronics 2016, 102242D (30 December 2016); https://doi.org/10.1117/12.2266838

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