Advances In Excimer Laser Materials Processing: An Update

G. Darcy Poulin; Peter A. Eisele; Thomas A. Znotins

doi:10.1117/12.950150

26 April 1989 Advances In Excimer Laser Materials Processing: An Update

G. Darcy Poulin, Peter A. Eisele, Thomas A. Znotins

Proceedings Volume 1023, Excimer Lasers and Applications; (1989) https://doi.org/10.1117/12.950150
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

Excimer lasers are finding increasing use in the area of laser materials processing. Of particular importance is the fact that excimers can remove material through ablation rather than by any purely thermal mechanism such as those associated with YAG or CO2 processing. This paper reviews briefly the basic mechanisms associated with excimer laser ablation and presents several examples of practical applications of this new technique.

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G. Darcy Poulin, Peter A. Eisele, and Thomas A. Znotins "Advances In Excimer Laser Materials Processing: An Update", Proc. SPIE 1023, Excimer Lasers and Applications, (26 April 1989); https://doi.org/10.1117/12.950150

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