High Repetition Rate High Power Excimer Lasers

Hubertus M. von Bergmann; Gordon L. Bredenkamp; Piet H. Swart

doi:10.1117/12.950120

26 April 1989 High Repetition Rate High Power Excimer Lasers

Hubertus M. von Bergmann, Gordon L. Bredenkamp, Piet H. Swart

Proceedings Volume 1023, Excimer Lasers and Applications; (1989) https://doi.org/10.1117/12.950120
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

We report on the development of high repetition rate, high average power excimer laser systems with projected repetition rates of several kHz and multi kilowatt outputs. An optimized system concept has been derived by theoretically and experimentally comparing the various system options. Preliminary results are presented for a compact spark-preionized KrF and XeC1 excimer laser system operating at repetition rates of up to 800 Hz and being capable of average output powers of more than 300 W. The laser is excited by a single-thyratron switched LC-inversion circuit, utilizing single or double stage pulse compression.

Citation Download Citation

Hubertus M. von Bergmann, Gordon L. Bredenkamp, and Piet H. Swart "High Repetition Rate High Power Excimer Lasers", Proc. SPIE 1023, Excimer Lasers and Applications, (26 April 1989); https://doi.org/10.1117/12.950120

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available