Translator Disclaimer
31 May 2017 High-aperture monochromator-reflectometer and its usefulness for CCD calibration
Author Affiliations +
We present a laboratory high-aperture monochromator-reflectometer employing laser-plasma radiation source and three replaceable Schwarzschild objectives for a certain range of applications in the soft X-ray spectral waveband. Three sets of X-ray multilayer mirrors for the Schwarzschild objectives enable operation of the reflectometer at the wavelengths of 135, 171 and 304 Å, while a goniometer with three degrees of freedom allows different measurement modes. We have used the facility for a laboratory CCD calibration at the wavelengths specified. Combined with the results of the CCD sensitivity measurements conducted in the VUV spectral waveband, the total outcome provides a more comprehensive understanding of the CCD effectivity in a wide spectral range.
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Eugene A. Vishnyakov, Alexander V. Shcherbakov, Andrei A. Pertsov, Vladimir N. Polkovnikov, Alexey E. Pestov, Dmitry E. Pariev, and Nikolai I. Chkhalo "High-aperture monochromator-reflectometer and its usefulness for CCD calibration", Proc. SPIE 10235, EUV and X-ray Optics: Synergy between Laboratory and Space V, 102350W (31 May 2017);


Status of EUV reflectometry at PTB
Proceedings of SPIE (April 01 2013)
Multilayer optics for plasma physics and synchrotron radiation
Proceedings of SPIE (September 18 1995)
Metrology in the soft x ray range from EUV...
Proceedings of SPIE (September 25 2008)

Back to Top