MEMS-based array for hydrogen sulfide detection employing a phase transition

B. Bierer; C. Dinc; H. Gao; J. Wöllenstein; S. Palzer

doi:10.1117/12.2265743

13 June 2017 MEMS-based array for hydrogen sulfide detection employing a phase transition

B. Bierer, C. Dinc, H. Gao, J. Wöllenstein, S. Palzer

Proceedings Volume 10246, Smart Sensors, Actuators, and MEMS VIII; 102460D (2017) https://doi.org/10.1117/12.2265743
Event: SPIE Microtechnologies, 2017, Barcelona, Spain

Abstract

The monitoring of hydrogen sulfide in biogas is crucial due to its highly corrosive properties. Most notably, the lifetime of heat and power generation machinery suffers from high levels of hydrogen sulfide. Here an approach to enable large-scale, low cost deployment of selective, quasi-continuous hydrogen sulfide detection systems is presented. A chip featuring three individually controllable hotplates has been developed for this purpose. Each hotplate device consists of a heating structure and an interdigitated electrode structure, which we use to control the temperature and determine the resistivity of copper(II)oxide nanospheres, respectively. The fundamental process to determine the hydrogen sulfide concentration is based on a phase transition that occurs in the temperature regime below 200°C. The transition process may be reversed at temperatures above 300°C thus resetting the sensing layer. However, the reversal takes times, which is why we use a total of six hotplates simultaneously to enable a quasi-continuous monitoring of the hydrogen sulfide concentration.

Conference Presentation

Citation Download Citation

B. Bierer, C. Dinc, H. Gao, J. Wöllenstein, and S. Palzer "MEMS-based array for hydrogen sulfide detection employing a phase transition", Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 102460D (13 June 2017); https://doi.org/10.1117/12.2265743

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