Translator Disclaimer
7 June 2017 A multi-functional MEMS-SPM for quantitative characterization of nano-objects
Author Affiliations +
Proceedings Volume 10246, Smart Sensors, Actuators, and MEMS VIII; 102460J (2017)
Event: SPIE Microtechnologies, 2017, Barcelona, Spain
Based upon the micro-fabrication technology, a series of MEMS scanning probe microscopes (MEMS-SPM) have been developed in the national metrology institute Physikalisch-Technische Bundesanstalt (PTB) in Braunschweig. In comparison with those traditional AFMs, the MEMS-SPM features generally a vertical deflection up to 10 μm with a resolution of 0.2 nm, a non-linearity less than 0.03%, and a testing force up to several hundreds of μN with a force resolution down to 1 nN by means of a capacitive displacement sensing technique. As a result, these MEMS-SPMs can be successfully applied in the field of nanodimensional and nanomechanical metrology. Mechanical design of the MEMS-SPM is reported in this manuscript. Proof-of-principle measurements using a prototype of the MEMS-SPM are detailed in this manuscript, verifying the capabilities of the MEMS-SPM.
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zhi Li, Sai Gao, Uwe Brand, Karla Hiller, Nicole Wollschläger, and Xianghui Zhang "A multi-functional MEMS-SPM for quantitative characterization of nano-objects", Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 102460J (7 June 2017);

Back to Top