Improved thermal and electrical design for an all-Si thermoelectric micropower source

I. Donmez; M. Salleras; C. Calaza; G. Gadea; A. Morata; A. Tarancón; L. Fonseca

doi:10.1117/12.2266015

30 May 2017 Improved thermal and electrical design for an all-Si thermoelectric micropower source

I. Donmez, M. Salleras, C. Calaza, G. Gadea, A. Morata, A. Tarancón, L. Fonseca

Proceedings Volume 10246, Smart Sensors, Actuators, and MEMS VIII; 102460Y (2017) https://doi.org/10.1117/12.2266015
Event: SPIE Microtechnologies, 2017, Barcelona, Spain

Abstract

This work presents current achievements on the fabrication and characterization of an all-Si based planar thermoelectric microgenerator. Ordered dense arrays of Vapor-Liquid-Solid (VLS) grown p-type Si nanowires (Si NWs) are integrated in predefined thermally isolated microstructures as nanostructured thermoelectric active material. Optimizations in device processing and architecture that improved both thermal and electrical performances of the microgenerator resulted in a 70 fold increase in power output. Furthermore, the performance of microgenerators with Si NWs is compared to that of microgenerators with micron-sized Si beams as active material. Additionally, a 60 fold improvement in power output is observed by placing a cold-finger on top of the thermally isolated microstructure to demonstrate the effect of a heat exchanger, which is currently being implemented on the microgenerator.

Conference Presentation

Citation Download Citation

I. Donmez, M. Salleras, C. Calaza, G. Gadea, A. Morata, A. Tarancón, and L. Fonseca "Improved thermal and electrical design for an all-Si thermoelectric micropower source", Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 102460Y (30 May 2017); https://doi.org/10.1117/12.2266015

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