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30 May 2017 Improved thermal and electrical design for an all-Si thermoelectric micropower source
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Proceedings Volume 10246, Smart Sensors, Actuators, and MEMS VIII; 102460Y (2017)
Event: SPIE Microtechnologies, 2017, Barcelona, Spain
This work presents current achievements on the fabrication and characterization of an all-Si based planar thermoelectric microgenerator. Ordered dense arrays of Vapor-Liquid-Solid (VLS) grown p-type Si nanowires (Si NWs) are integrated in predefined thermally isolated microstructures as nanostructured thermoelectric active material. Optimizations in device processing and architecture that improved both thermal and electrical performances of the microgenerator resulted in a 70 fold increase in power output. Furthermore, the performance of microgenerators with Si NWs is compared to that of microgenerators with micron-sized Si beams as active material. Additionally, a 60 fold improvement in power output is observed by placing a cold-finger on top of the thermally isolated microstructure to demonstrate the effect of a heat exchanger, which is currently being implemented on the microgenerator.
Conference Presentation
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
I. Donmez, M. Salleras, C. Calaza, G. Gadea, A. Morata, A. Tarancón, and L. Fonseca "Improved thermal and electrical design for an all-Si thermoelectric micropower source", Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 102460Y (30 May 2017);

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