Integrated TiN coated porous silicon supercapacitor with large capacitance per foot print

Kestutis Grigoras; Leif Grönberg; Jouni Ahopelto; Mika Prunnila

doi:10.1117/12.2266603

30 May 2017 Integrated TiN coated porous silicon supercapacitor with large capacitance per foot print

Kestutis Grigoras, Leif Grönberg, Jouni Ahopelto, Mika Prunnila

Proceedings Volume 10246, Smart Sensors, Actuators, and MEMS VIII; 102460Z (2017) https://doi.org/10.1117/12.2266603
Event: SPIE Microtechnologies, 2017, Barcelona, Spain

Abstract

We have fabricated a micro-supercapacitor with porous silicon electrodes coated with TiN by atomic layer deposition technique. The coating provides an efficient surface passivation and high electrical conductivity of the electrodes, resulting in stable and almost ideal electrochemical double layer capacitor behavior with characteristics comparable to the best carbon based micro-supercapacitors. Stability of the supercapacitor is verified by performing 50 000 voltammetry cycles with high capacitance retention obtained. Silicon microfabrication techniques facilitate integration of both supercapacitor electrodes inside the silicon substrate and, in this work, such in-chip supercapacitor is demonstrated. This approach allows realization of very high capacitance per foot print area. The in-chip micro-supercapacitor can be integrated with energy harvesting elements and can be used in wearable and implantable microdevices.

Citation Download Citation

Kestutis Grigoras, Leif Grönberg, Jouni Ahopelto, and Mika Prunnila "Integrated TiN coated porous silicon supercapacitor with large capacitance per foot print", Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 102460Z (30 May 2017); https://doi.org/10.1117/12.2266603

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available