Micro-resonator-based electric field sensors with long durations of sensitivity

Amir R. Ali

doi:10.1117/12.2266062

30 May 2017 Micro-resonator-based electric field sensors with long durations of sensitivity

Amir R. Ali

Proceedings Volume 10247, Bio-MEMS and Medical Microdevices III; 102470D (2017) https://doi.org/10.1117/12.2266062
Event: SPIE Microtechnologies, 2017, Barcelona, Spain

Abstract

In this paper, we present a new fabrication method for the whispering gallery mode (WGM) micro-sphere based electric field sensor that which allows for longer time periods of sensitivity. Recently, a WGM-based photonic electric field sensor was proposed using a coupled dielectric microsphere-beam. The external electric field imposes an electrtrostriction force on the dielectric beam, deflecting it. The beam, in turn compresses the sphere causing a shift in its WGM. As part of the fabrication process, the PDMS micro-beams and the spheres are curied at high-temperature (100oC) and subsequently poled by exposing to strong external electric field (~8 MV/m) for two hours. The poling process allows for the deposition of surface charges thereby increasing the electrostriction effect. This methodology is called curing-then-poling (CTP). Although the sensors do become sufficiently sensitive to electric field, they start de-poling after a short period (within ~ 10 minutes) after poling, hence losing sensitivity. In an attempt to mitigate this problem and to lock the polarization for a longer period, we use an alternate methodology whereby the beam is poled and cured simultaneously (curing-while-poling or CWP). The new fabrication method allows for the retention of polarization (and hence, sensitivity to electric field) longer (~ 1500 minutes). An analysis is carried out along with preliminary experiments. Results show that electric fields as small as ~ 100 V/m can be detected with a 300 μm diameter sphere sensor a day after poling.

Citation Download Citation

Amir R. Ali "Micro-resonator-based electric field sensors with long durations of sensitivity", Proc. SPIE 10247, Bio-MEMS and Medical Microdevices III, 102470D (30 May 2017); https://doi.org/10.1117/12.2266062

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