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28 January 1993 Perspectives of OEIC examples for photoreceiver applications
D. Decoster
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Proceedings Volume 10267, Integrated Optics and Optoelectronics: A Critical Review; 102670J (1993) https://doi.org/10.1117/12.141407
Event: OE/LASE'93: Optics, Electro-Optics, and Laser Applications in Scienceand Engineering, 1993, Los Angeles, CA, United States
Abstract
Technological compatibility between photodetectors and field effect transistors or optical waveguides is one of the key factors for the development of integrated circuits associating such components. In this paper, we present recent advances in Europe such as the use of lattice mismatch epitaxy, selective and shadow masked growth, planar structure and dielectric optical waveguide to reduce the technological difficulties inherent to the fabrication of these integrated circuits.
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D. Decoster "Perspectives of OEIC examples for photoreceiver applications", Proc. SPIE 10267, Integrated Optics and Optoelectronics: A Critical Review, 102670J (28 January 1993); https://doi.org/10.1117/12.141407
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KEYWORDS
Photonic integrated circuits
Integrated circuits
Waveguides
Dielectrics
Epitaxy
Field effect transistors
Photodetectors
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