Challenge of Si/SiGe technology to optoelectronics

C.Y. Chang; J. G. Jung

doi:10.1117/12.141408

28 January 1993 Challenge of Si/SiGe technology to optoelectronics

C.Y. Chang, J. G. Jung

Proceedings Volume 10267, Integrated Optics and Optoelectronics: A Critical Review; 102670K (1993) https://doi.org/10.1117/12.141408
Event: OE/LASE'93: Optics, Electro-Optics, and Laser Applications in Scienceand Engineering, 1993, Los Angeles, CA, United States

Abstract

Low temperature epitaxy (LTE) of Si and SiGecanbe performed at a temperature of 550 C or lower. Very promising applications can be opened. Such as high speed/high frequency operations at 90GHZ by constructing heterojunction bipolar transistors. High performance FET'slikepseudomorphic p-channel orn-channel high mobility field effect transistors are presented which canbe composed to perform CMOS operations.

Optoelectronic devices such as IRdetectors (1-12um), mutiple quantum well (MOW), disordered superlattice (d-SL) which are the potential candidatesof IR detector and optical sources (e.q. LED, LD etc.)

Various physical insights regarding to SiGe heterostructures are presented which includeswave function filter, mass filter as well as band mixing are introduced.

Researchesat National Nano Device Laboratory (NDL) which processes the capability of 0.3um Si ULSI technologies and SiGe works as well as lll-V, a-Si/SiGe lines are also presented.

Citation Download Citation

C.Y. Chang and J. G. Jung "Challenge of Si/SiGe technology to optoelectronics", Proc. SPIE 10267, Integrated Optics and Optoelectronics: A Critical Review, 102670K (28 January 1993); https://doi.org/10.1117/12.141408

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