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30 July 1997 SEM techniques for materials characterization
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The scanning electron microscope (SEM) can be used to study and characterize a wide variety of materials used in photonic applications. These range from highly conductive samples to insulating materials. Several different techniques make use of this versatile tool. These include secondary electron imaging, backscattered electron imaging, X-ray analysis (both qualitative and quantitative), electron channeling patterns for studying crystalline materials, charge collection techniques for semiconductor samples and cathodoluminescence. These techniques will be described here with examples of applications. In addition, electron-matter interactions as well as the basic operation principles of the scanning electron microscope will be discussed.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jacques Beauvais, Dominique Drouin, and Raynald Gauvin "SEM techniques for materials characterization", Proc. SPIE 10291, Materials Characterization and Optical Probe Techniques: A Critical Review, 102910B (30 July 1997);

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