Back-illuminated solar-blind AlxGa1-xN p-i-n photodiodes

J. C. Campbell; Chris J. Collins; M. M. Wong; U. Chowdhury; Russell D. Dupuis

doi:10.1117/12.482619

28 August 2002 Back-illuminated solar-blind Al_xGa_1-xN p-i-n photodiodes

J. C. Campbell, Chris J. Collins, M. M. Wong, U. Chowdhury, Russell D. Dupuis

Proceedings Volume 10303, Gallium-Nitride-based Technologies: A Critical Review; 103030G (2002) https://doi.org/10.1117/12.482619
Event: Symposium on Integrated Optoelectronic Devices, 2002, San Jose, California, United States

Abstract

In the past few years, the wide-bandgap III-N compound semiconductor materials have been the subject of intense research owing to their commercial importance for the production of high-brightness light-emitting diodes. Another potentially important application for the Column III nitrides is for detection of ultra-violet radiation for various sensing, monitoring, and control applications. There has been a growing interest in back-illuminated solar-blind Al_xGa_1-xN photodiodes for flip-chip mounting to silicon read-out circuits. These devices not only need to have high external quantum efficiencies, but these efficiencies must be achieved at, or less than, the operating voltage of the readout display. This paper describes Al_xGa_1-xN heteroepitaxial back-illuminated p-i-n photodiodes that have been developed for these applications.

Citation Download Citation

J. C. Campbell, Chris J. Collins, M. M. Wong, U. Chowdhury, and Russell D. Dupuis "Back-illuminated solar-blind Al_xGa_1-xN p-i-n photodiodes", Proc. SPIE 10303, Gallium-Nitride-based Technologies: A Critical Review, 103030G (28 August 2002); https://doi.org/10.1117/12.482619

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