A Diagnostic System For An Excimer Laser Beam

T. Yagi; Y. Matsumi; K. Ohta; H. Saito; M. Obara; T. Fujioka

doi:10.1117/12.950547

20 June 1989 A Diagnostic System For An Excimer Laser Beam

T. Yagi, Y. Matsumi, K. Ohta, H. Saito, M. Obara, T. Fujioka

Proceedings Volume 1031, 7th Intl Symp on Gas Flow and Chemical Lasers; (1989) https://doi.org/10.1117/12.950547
Event: 7th International Symposium on Gas Flow and Chemical Lasers, 1988, Vienna, Austria

Abstract

An imaging system with a two dimensional photo diode array was developed for the excimer laser beam diagnostics. It is featured with a fast frame rate, high spacial resolution, and responsibity at the uv wave length. With a simple optical set up for the imager, we measured a near and a far field pattern simultaneously and the spectral band width of the consecutive KrF excimer laser pulses at 250Hz. These measurements shows our imaging system possesses enough spacial resolution for the beam pattern and spectral measurements.

Citation Download Citation

T. Yagi, Y. Matsumi, K. Ohta, H. Saito, M. Obara, and T. Fujioka "A Diagnostic System For An Excimer Laser Beam", Proc. SPIE 1031, 7th Intl Symp on Gas Flow and Chemical Lasers, (20 June 1989); https://doi.org/10.1117/12.950547

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