Principles and techniques of STM lithography

Mark A. McCord; Roger Fabian W. Pease

doi:10.1117/12.183194

3 October 1993 Principles and techniques of STM lithography

Mark A. McCord, Roger Fabian W. Pease

Proceedings Volume 10310, Technology of Proximal Probe Lithography; 1031003 (1993) https://doi.org/10.1117/12.183194
Event: SPIE Institutes for Advanced Optical Technologies 10, 1993, Bellingham, WA, United States

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Mark A. McCord and Roger Fabian W. Pease "Principles and techniques of STM lithography", Proc. SPIE 10310, Technology of Proximal Probe Lithography, 1031003 (3 October 1993); https://doi.org/10.1117/12.183194

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