Role of scanning probe microscopes in the development of nanoelectric devices

Arunava Majumdar; Stuart M. Lindsay

doi:10.1117/12.183195

3 October 1993 Role of scanning probe microscopes in the development of nanoelectric devices

Arunava Majumdar, Stuart M. Lindsay

Proceedings Volume 10310, Technology of Proximal Probe Lithography; 1031004 (1993) https://doi.org/10.1117/12.183195
Event: SPIE Institutes for Advanced Optical Technologies 10, 1993, Bellingham, WA, United States

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Arunava Majumdar and Stuart M. Lindsay "Role of scanning probe microscopes in the development of nanoelectric devices", Proc. SPIE 10310, Technology of Proximal Probe Lithography, 1031004 (3 October 1993); https://doi.org/10.1117/12.183195

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