INO MEMS Foundry

Christine Alain

doi:10.1117/12.2283871

29 August 2017 INO MEMS Foundry

Christine Alain

Proceedings Volume 10313, Opto-Canada: SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging; 1031323 (2017) https://doi.org/10.1117/12.2283871
Event: Opto-Canada: SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging, 2002, Ottawa, Ontario, Canada

Abstract

Microfabrication for integrated MEMS is the art of combining micro electronic circuits with micro optics, mechanics, fluidics, sensing and other technologies. To meet the diversified requirements for MEMS (Micro Electro Mechanical Systems) and MOEMS (Micro Opto Electro Mechanical Systems), a broad spectrum of materials and fabrication processes must be available. INO is the only entity offering MEMS foundry-type services in Canada. These services include design, prototyping, fabrication of mini-series, packaging and testing of various MEMS.

Citation Download Citation

Christine Alain "INO MEMS Foundry", Proc. SPIE 10313, Opto-Canada: SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging, 1031323 (29 August 2017); https://doi.org/10.1117/12.2283871

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